Pursuing the ultimate precision in linear guide stages!
In addition to repeatability better than 1μm,
dynamic motion control has been enhanced,
which is ideal for speed stability
and multi-axis synchronized accuracies!
As semiconductor manufacturing processes become increasingly miniaturized, the demands for securing yield rates and achieving high throughput are becoming ever more stringent.
To contribute to the increasingly complex semiconductor manufacturing process, YASDA has maximized the performance of its linear guides by thoroughly pursuing not only compensational technology but also mechanical precision.
At SEMICON JAPAN 2025, we will exhibit a stage suitable for 600mm panel sizes. Featuring XYZ axes with repeatability in the 0.1μm range, it is also equipped with our proprietary θ axis. This stage accommodates diverse applications within semiconductor manufacturing.
Three core technologies of YASDA
for achieving precision stages,
using designs and skills sophisticated longer than a half century
Pursuing precision in every process
Manufacturing
Technology
Mastering Straightness, Parallelism, and Perpendicularity, YASDA ensures uncompromised sub-micron assembly. With over 50 years of excellence, we provide a complete one-stop manufacturing service—from parts processing to inspection—under thorough quality control.
Accurate positioning and speed
High tracking control
Beyond repeatability, YASDA achieves high dynamic performance—including constant speed and multi-axis synchronization—via thorough servo tuning. Additionally, our units feature superior thermal rigidity and vibration resistance, enabling high-value manufacturing.
As flat and straight as possible
Hand scraping
that makes beyond
machining accuracies
Craftsmen use “hand scraping” and high-precision autocollimators to install linear guides with straightness exceeding machining limits. This precise alignment minimizes individual errors, ensuring consistent accuracy across all units.
Expanding the precision of high-rigidity linear guide stages
to the level of air slide stages
YASDA offers linear guide stages that combine precision and rigidity.
In the rapidly advancing semiconductor field of 2.5D/3D packaging, high alignment accuracy is required in the process of bonding chips together. In this context, YASDA meets these requirements by manufacturing stages that combine “sub-micron accuracy” and “rigidity” in the development of equipment for advanced processes. Linear guide ways avoid the pulsation that occurs with static pressure guide ways, and YASDA's outstanding assembly technology achieves low waving, high repeatability, and stable positioning. YASDA’s linear guide stages are suitable for equipment which are excellent for bonding and inspection processes where air slides are not perfectly suited for handling heavy loads. These need to be stable under conditions like high loads and high temperature.
Large XYZθ Stage for Semiconductor Manufacturing and Inspection Equipment
【Exhibited at SEMICON JAPAN 2025】
Even with large strokes, it achieves both high repeatability and
stable attitude stability
A stage equipped with two XY axes, a Z axis, and a θ axis for alignment, designed for manufacturing equipment used in panel-level packaging processes.
In addition to high positioning accuracy throughout the entire stroke range, the mechanical stage minimizes displacement during operation, contributing to enhanced production efficiency in advanced semiconductor manufacturing.
Customization is possible to meet your specifications and requirements, for example with high load capacity specifications or extended stroke.
※ This stage is a prototype.
Specifications
| Travel | ||
| X-axis | 620mm | |
| Y-axis | 1200mm | |
| Z-axis | 10mm | |
| θ-axis | ±2° | |
| Straightness (vertical) | 1.0μm | |
| Straightness (holizontal) | 1.0μm | |
| Max. speed | 250mm/sec | |
| Max. acceleration | 2.2m/s^2 | |
| Pitching | 1.3 arcsec | |
| Yawing | 1.3 arcsec | |
| Repeatability | ±0.1μm | |
High precision XY stage with high dynamic response 【Exhibited at SEMICON JAPAN 2024】
Realizing extra-high repeatability
High-end XY stage for semiconductor manufacturing equipment that combines high repeatability and dynamic motion control.
In addition to repeatability, this stage pursues rolling and pitching accuracy, low waving, thorough servo adjustment and dynamic motion control.
※ This stage is a prototype, and customizable according to each customer’ s requirement.
Specifications
| Travel X-axis | Effective length ±150mm max. 730mm |
| Travel Y-axis | Effective length ±150mm max. 780mm |
| Straightness (vertical) | 1.0μm |
| Straightness (holizontal) | 1.0μm |
| Max. speed | 250mm/sec |
| Max. acceleration | 3m/s^2 |
| Pitching | 1.3arcsec |
| Yawing | 1.3arcsec |
| Repeatability | ±0.1μm |
Stages for semiconductor inspection equipment
YASDA provides one-stop manufacturing for precise X, Y, Z, and optional θ-axis stages. Leveraging our machine tool expertise, we rigorously inspect and adjust every unit to guarantee strict accuracy prior to shipment.
- OEM
- Shipping record over 100 stages
| Travel X-axis | 400mm |
| Travel Y-axis | 500mm |
| Positioning accuracy | ±10µm |
| Straightness (vertical) | ±5㎛ |
| Repeatability | ±2.5㎛ |
Stages for Flat Panel Display manufacturing equipment
YASDA can offer manufacturing large stages in its large capacity flexible clean rooms.
- OEM
- Shipping record over 100 stages
| Travel X-axis | 3000mm |
| Travel Y-axis | 5000mm |
| Pitching | ≧15arcsecond |
| Repeatability | ±2㎛ |
Manufacturing machining centers
that achieve machining accuracy
of 0.001mm
Machining centers are essential equipment for manufacturing,
and are used in a wide range of fields,
from the automotive and aerospace industries to semiconductors,
medical equipment, and smartphone camera lenses.
Aiming for the best,
not the biggest.
Guided by this enduring slogan embodying the YASDA Spirit, we at YASDA have, since our founding in 1929, consistently pursued unparalleled precision and durability.
We have poured our soul into rigorous quality control and into the meticulous craftsmanship of our engineers.
As a result, we have earned recognition as the YASDA brand from top manufacturers worldwide and gained significant trust in the high-precision machining field.
Trust and results built through contract manufacturing
Leveraging a wealth of technology accumulated from manufacturing world-leading machining centers,
YASDA offers contract manufacturing for high-precision stages used in semiconductor equipment.
Assembly Environment
and Equipment
YASDA manufactures OEM semiconductor and FPD equipment in large-scale cleanrooms.
Our unique capability ensures high precision even for such massive, specialized systems.
Assembly Environment
No. 1 Assembly building Assembly area
| Site area | 41m×32m |
| Cranes | 2.8ton x 4 / 1ton x 2units |
No. 2 Assembly building Clean Room
| Site area | 26m×56m |
| Cranes | 10ton & 2.8ton x 2units |
No. 1 Assembly building Assembly area
| Site area | 27m×40m |
| Cranes | 2.8ton x 2 / 1ton x 3units |
Manufacturing equipment
Stone surface plate: JIS 0 grade
- 1,200mm×2,000mm/6units
- 1,000mm×1,500mm/3units
- 1,800mm×3,600mm/1units
- 2,000mm×3,000mm/1units
Autocollimator
Measuring straightness of linear axes finished by hand-scraping.
- Taylor Hobson x 2units
Aiming the best, not the biggest
Used for precision inspection of completed table units. Measurements are conducted in a strictly temperature-controlled environment.
- Keysight x 2units
01 INQUIRY / CONTACT
Please contact us via contact form, then let us know your overview of the equipment
projects. We will respond to you as quickly as possible.
OEM
manufacturing
02 Hearing and inspection
Meetings based on your information and drawings provided, respecting NDA (Non-Disclosure Agreement) requirements.
ODM
manufacturing
including design process
02 Hearing and inspection
Meetings based on your accuracies, strokes, speed and specifications demanded, respecting NDA (Non-Disclosure Agreement) requirements.
03 Planning concept
Designing concept based on the meetings and preparing concept drawings and specifications.
04 Quotation
Prepare a quotation with general specifications based on the meetings.
04 Quotation
Prepare a quotation based on the basic concept, drawings and specifications.
05 Manufacturing
YASDA prioritizes quality as our most important point,
and rigorously manage every step of the design and manufacturing processes.
06 Delivery
Upon completion of the ordered stages, we conduct dynamic tests and inspections at our factory. The stages to be shipped after having pre-acceptance from the customer.
OEM manufacturing
01 INQUIRY / CONTACT
Please contact us via contact form, then let us know your overview of the equipment projects. We will respond to you as quickly as possible.
CONTACT FORM02 Hearing and inspection
Meetings based on your information and drawings provided, respecting NDA (Non-Disclosure Agreement) requirements.
03 Quotation
Prepare a quotation with general specifications based on the meetings.
04 Manufacturing
YASDA prioritizes quality as our most important point,
and rigorously manage every step of the design and manufacturing processes.
05 Delivery
Upon completion of the ordered stages, we conduct dynamic tests and inspections at our factory. The stages to be shipped after having pre-acceptance from the customer.
ODM
manufacturing
including design process
01 INQUIRY / CONTACT
Please contact us via contact form, then let us know your overview of the equipment projects. We will respond to you as quickly as possible.
CONTACT FORM02 Hearing and inspection
Meetings based on your accuracies, strokes, speed and specifications demanded, respecting NDA (Non-Disclosure Agreement) requirements.
03 Planning concept
Designing concept based on the meetings and preparing concept drawings and specifications.
04 Quotation
Prepare a quotation based on the basic concept, drawings and specifications.
05 Manufacturing
YASDA prioritizes quality as our most important point,
and rigorously manage every step of the design and manufacturing processes.
06 Delivery
Upon completion of the ordered stages, we conduct dynamic tests and inspections at our factory. The stages to be shipped after having pre-acceptance from the customer.
Large XYZθ Stage
for Semiconductor Manufacturing
and Inspection Equipment
High precision XY stage
with high dynamic response
E-mail contact
