In addition to repeatability better than 1μm,
dynamic motion control has been enhanced,
which is ideal for speed stability
and multi-axis synchronized accuracies!

As semiconductor manufacturing processes become increasingly miniaturized, the demands for securing yield rates and achieving high throughput are becoming ever more stringent.

To contribute to the increasingly complex semiconductor manufacturing process, YASDA has maximized the performance of its linear guides by thoroughly pursuing not only compensational technology but also mechanical precision.

At SEMICON JAPAN 2025, we will exhibit a stage suitable for 600mm panel sizes. Featuring XYZ axes with repeatability in the 0.1μm range, it is also equipped with our proprietary θ axis. This stage accommodates diverse applications within semiconductor manufacturing.