Large XYZθ Stage for Semiconductor Manufacturing and Inspection Equipment
【Exhibited at SEMICON JAPAN 2025】
Even with large strokes, it achieves both high repeatability and
stable attitude stability
A stage equipped with two XY axes, a Z axis, and a θ axis for alignment, designed for manufacturing equipment used in panel-level packaging processes.
In addition to high positioning accuracy throughout the entire stroke range, the mechanical stage minimizes displacement during operation, contributing to enhanced production efficiency in advanced semiconductor manufacturing.
Customization is possible to meet your specifications and requirements, for example with high load capacity specifications or extended stroke.
※ This stage is a prototype.
Specifications
| Travel | ||
| X-axis | 620mm | |
| Y-axis | 1200mm | |
| Z-axis | 10mm | |
| θ-axis | ±2° | |
| Straightness (vertical) | 1.0μm | |
| Straightness (holizontal) | 1.0μm | |
| Max. speed | 250mm/sec | |
| Max. acceleration | 2.2m/s^2 | |
| Pitching | 1.3 arcsec | |
| Yawing | 1.3 arcsec | |
| Repeatability | ±0.1μm | |
High precision XY stage with high dynamic response 【Exhibited at SEMICON JAPAN 2024】
Realizing extra-high repeatability
High-end XY stage for semiconductor manufacturing equipment that combines high repeatability and dynamic motion control.
In addition to repeatability, this stage pursues rolling and pitching accuracy, low waving, thorough servo adjustment and dynamic motion control.
※ This stage is a prototype, and customizable according to each customer’ s requirement.
Specifications
| Travel X-axis | Effective length ±150mm max. 730mm |
| Travel Y-axis | Effective length ±150mm max. 780mm |
| Straightness (vertical) | 1.0μm |
| Straightness (holizontal) | 1.0μm |
| Max. speed | 250mm/sec |
| Max. acceleration | 3m/s^2 |
| Pitching | 1.3arcsec |
| Yawing | 1.3arcsec |
| Repeatability | ±0.1μm |
Stages for semiconductor inspection equipment
YASDA provides one-stop manufacturing for precise X, Y, Z, and optional θ-axis stages. Leveraging our machine tool expertise, we rigorously inspect and adjust every unit to guarantee strict accuracy prior to shipment.
- OEM
- Shipping record over 100 stages
| Travel X-axis | 400mm |
| Travel Y-axis | 500mm |
| Positioning accuracy | ±10µm |
| Straightness (vertical) | ±5㎛ |
| Repeatability | ±2.5㎛ |
Stages for Flat Panel Display manufacturing equipment
YASDA can offer manufacturing large stages in its large capacity flexible clean rooms.
- OEM
- Shipping record over 100 stages
| Travel X-axis | 3000mm |
| Travel Y-axis | 5000mm |
| Pitching | ≧15arcsecond |
| Repeatability | ±2㎛ |
